Plasma Enhanced Chemical Vapour Deposition

<body topmargin=0 leftmargin=0 marginheight=0 marginwidth=0> <table cellpadding=0 cellspacing=0 border=0><tr> <td valign="top" colspan=2 height=80 BGCOLOR="#000000" TEXT="#F7F7FF" bgproperties="fixed" background="03f00500dvldtc.gif"> <div> <FONT SIZE="5" COLOR="#FFCC66" FACE="Arial" ><B>Advanced Materials Characterization Laboratory</B></FONT><B>     |     </B><A HREF="equipment.htm" TARGET="_top" TITLE="Advanced Materials Characterization Labo"><U><B>home</B></U></A></div> <div> <A HREF="id17.htm" TARGET="_top" TITLE="Field Emission Scanning Electron Microsc"><U>Field Emission Scanning Electron Microscope</U></A>   |   <B>Plasma Enhanced Chemical Vapour Deposition</B>   |   <A HREF="id19.htm" TARGET="_top" TITLE="Spin Coater"><U>Spin Coater</U></A>   |   <A HREF="id20.htm" TARGET="_top" TITLE="Magnetron Sputter Coater"><U>Magnetron Sputter Coater</U></A>   |   <A HREF="id21.htm" TARGET="_top" TITLE="Ellipsometer"><U>Ellipsometer</U></A>   |   <A HREF="id22.htm" TARGET="_top" TITLE="Thermogravimetrical Analyzer"><U>Thermogravimetrical Analyzer</U></A>   |   <A HREF="id23.htm" TARGET="_top" TITLE="Image Gallery"><U>Image Gallery</U></A></div> <div> </div> </td> </tr><tr> <td valign="top" width=210 BGCOLOR="#000000" TEXT="#F7F7FF" background="040d2c00dvldtc.gif"> <div> <IMG SRC="0d1b6890.jpg" border=0 width="182" height="137" ALIGN="BOTTOM" HSPACE="0" VSPACE="0"></div> <div> <IMG SRC="0d3b88a0.jpg" border=0 width="184" height="138" ALIGN="BOTTOM" HSPACE="0" VSPACE="0"></div> <div> <IMG SRC="0d5b88a0.jpg" border=0 width="184" height="138" ALIGN="BOTTOM" HSPACE="0" VSPACE="0"></div> <div> <IMG SRC="11eb88a0.jpg" border=0 width="184" height="138" ALIGN="BOTTOM" HSPACE="0" VSPACE="0"></div> </td> <td valign="top" height=400 BGCOLOR="#000000" TEXT="#F7F7FF"> <div> Plasma Enhanced Chemical Vapour Deposition</div> <div> Our PE-CVD NPE-4000 from NanoMaster Inc. ( <FONT SIZE="3" COLOR="#0000FF" FACE="Arial" ><A HREF="http://www.nanomaster.com/" TARGET="_top" TITLE="http://www.nanomaster.com/"><U><U>http://www.nanomaster.com/</U></U></A></FONT> ) has the following technical specifications:</div> <div> <IMG BORDER="0" SRC="Symb075c00b700f066ccff00.gif" HEIGHT="16" WIDTH="24" ALIGN="bottom" HSPACE="0" VSPACE="0">14" Stainless Steel Chamber </div> <div> <IMG BORDER="0" SRC="Symb075c00b700f066ccff00.gif" HEIGHT="16" WIDTH="24" ALIGN="bottom" HSPACE="0" VSPACE="0">Turbo pump backed with a rotary pump </div> <div> <IMG BORDER="0" SRC="Symb075c00b700f066ccff00.gif" HEIGHT="16" WIDTH="24" ALIGN="bottom" HSPACE="0" VSPACE="0">ICP P200 RF Source with Dressler 1KW PS </div> <div> <IMG BORDER="0" SRC="Symb075c00b700f066ccff00.gif" HEIGHT="16" WIDTH="24" ALIGN="bottom" HSPACE="0" VSPACE="0">Two modes: RF BIAS 300W to substrate platen and DC BIAS 1000V to substrate platen. </div> <div> <IMG BORDER="0" SRC="Symb075c00b700f066ccff00.gif" HEIGHT="16" WIDTH="24" ALIGN="bottom" HSPACE="0" VSPACE="0">6" Stainless Steel Platen </div> <div> <IMG BORDER="0" SRC="Symb075c00b700f066ccff00.gif" HEIGHT="16" WIDTH="24" ALIGN="bottom" HSPACE="0" VSPACE="0">Platen heater to 800oC </div> <div> <IMG BORDER="0" SRC="Symb075c00b700f066ccff00.gif" HEIGHT="16" WIDTH="24" ALIGN="bottom" HSPACE="0" VSPACE="0">8 MFC's </div> <div> <IMG BORDER="0" SRC="Symb075c00b700f066ccff00.gif" HEIGHT="16" WIDTH="24" ALIGN="bottom" HSPACE="0" VSPACE="0">Computer controlled </div> <bR> </td> </tr></table></body>