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Field Emission Scanning Electron Microscope
 Resolution: 2.1nm at 1kV, 1.3nm at 15kV and 1.0nm at 20kV
 High Tension Range: 100V to 30kV
 Beam Current: 4pA to 20nA
 Gun: Schottky Field Emission Gun
 Magnification Range: 20X to 900,000X
 Everhardt Thornley Secondary Electron Detector,
 In-lens Secondary Electron Detector;
 Specimen Current Detector;
 Back Scattering Detector
 Energy Dispersive Spectrometer: Oxford Instruments INCA 200
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